New Molecular Collisional Interaction Effect in Low-Energy Sputtering
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Date
1998-07-20
Authors
Yao, Y.
Hargitai, Z.
Albert, M.
Albridge, R.G.
Barnes, A.V.
Gilligan, J.M.
Ferguson, B. Pratt
Lupke, G.
Gordon, Vernita D.
Tolk, N.H.
Journal Title
Journal ISSN
Volume Title
Publisher
American Physical Society
Abstract
An unexpected pronounced enhancement is observed in sputtering yields per atom for N2+ compared to N+ from a polycrystalline gold target. This effect is seen when the kinetic energy per projectile atom is below 500 eV and increases as projectile energy decreases to near-threshold energies. Enhancements for O2+ over O+ begin at even lower kinetic energies below 100 eV per atom. This new molecular interaction effect may be explained qualitatively by invoking a simple energy transfer model which involves the vibrational frequency of the molecule and the collisional interaction time. [S0031-9007(98)06668-X]
Department
Description
Y. Yao, Z. Hargitai, M. Albert, R. G. Albridge, A. V. Barnes, J. M. Gilligan, B. Pratt Ferguson,
G. Lüpke, V. D. Gordon (currently with UT Austin), and N. H. Tolk are with the
Department of Physics and Astronomy, Vanderbilt University, Nashville, Tennessee 37235 -- J. C. Tully is with the
Department of Physics and Department of Chemistry, Yale University, New Haven, Connecticut 06520 -- G. Betz and W. Husinsky are with the
Institut für Allgemeine Physik, Technische Universität Wien, A-1040 Vienna, Austria
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Citation
Yao, Y., Z. Hargitai, M. Albert, R. G. Albridge, A. V. Barnes, J. M. Gilligan, B. Pratt Ferguson, et al. “New Molecular Collisional Interaction Effect in Low-Energy Sputtering.” Physical Review Letters 81, no. 3 (July 20, 1998): 550–53. doi:10.1103/PhysRevLett.81.550.