Rapid Prototyping of Functional Three-Dimensional Microsolenoids and Electromagnets by High-Pressure Laser Chemical Vapor Deposition

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dc.creatorMaxwell, J.
dc.creatorLarsson, K.
dc.creatorBoman, M.
dc.date.accessioned2019-02-26T18:01:39Z
dc.date.available2019-02-26T18:01:39Z
dc.date.issued1998
dc.description.abstractThree-dimensional laser chemical vapor deposition (3D-LCVD) is an emerging process which bridges the gap between various macro-scale rapid prototyping (RP) systems and microfabrication technologies. With the ability to deposit both metals and dielectrics 3D-LCVD may be used to prototype integrated electromechanical components from sub-micron to centimeter scales. This technological niche is increasingly important with the ever-decreasing size and sophistication of consumer and industrial products. The objective of this work was the development of functional microsolenoids and electromagnets, using 3D-LCVD as the primary fabrication tool. High-aspect-ratio microsolenoids have the potential to generate much greater magnetic-field densities than their thin-film counterparts,l and have many advantages when used as actuators in microelectromechanical systems (MEMS).2 3D-LCVD provides a means of fabricating such helical structures, with an ease unparalleled by any lithographic or rapid prototyping process.en_US
dc.description.departmentMechanical Engineeringen_US
dc.identifier.urihttps://hdl.handle.net/2152/73492
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/642
dc.language.isoengen_US
dc.relation.ispartof1998 International Solid Freeform Fabrication Symposiumen_US
dc.rights.restrictionOpenen_US
dc.subjectlaser chemical vapor depositionen_US
dc.subjectprimary fabrication toolen_US
dc.titleRapid Prototyping of Functional Three-Dimensional Microsolenoids and Electromagnets by High-Pressure Laser Chemical Vapor Depositionen_US
dc.typeConference paperen_US

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1998 International Solid Freeform Fabrication Symposium