Gas Phase Solid Freeform for Fabrication of Three-dimensional Ceramic Structures

Solid free form of ceramic materials can be achieved by deposition from the gas phase. The Selective Area Laser Deposition, or SALD, technique can be utilized to make ceramic depositions with a uniform chemical composition. In order to make all classes of ceramics, including carbides, nitrides, and oxides, selection of a precursor is an essential step. Often the correct precursor for the deposition requires a special environment, namely, one that can be uniformly heated. System design for a heated deposition chamber is discussed as well as preliminary tests of the system functionality. Silicon Carbide depositions were performed as a means of evaluating system parameters.