Gas Phase Solid Freeform for Fabrication of Three-dimensional Ceramic Structures

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dc.creatorWeiss, Clayton
dc.creatorMarcus, Harris L.
dc.date.accessioned2021-10-05T14:00:38Z
dc.date.available2021-10-05T14:00:38Z
dc.date.issued2011
dc.description.abstractSolid free form of ceramic materials can be achieved by deposition from the gas phase. The Selective Area Laser Deposition, or SALD, technique can be utilized to make ceramic depositions with a uniform chemical composition. In order to make all classes of ceramics, including carbides, nitrides, and oxides, selection of a precursor is an essential step. Often the correct precursor for the deposition requires a special environment, namely, one that can be uniformly heated. System design for a heated deposition chamber is discussed as well as preliminary tests of the system functionality. Silicon Carbide depositions were performed as a means of evaluating system parameters.en_US
dc.description.departmentMechanical Engineeringen_US
dc.identifier.urihttps://hdl.handle.net/2152/88374
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/15313
dc.language.isoengen_US
dc.publisherUniversity of Texas at Austinen_US
dc.relation.ispartof2011 International Solid Freeform Fabrication Symposiumen_US
dc.rights.restrictionOpenen_US
dc.subjectsolid freeformen_US
dc.subjectceramic materialsen_US
dc.subjectSelective Area Laser Depositionen_US
dc.titleGas Phase Solid Freeform for Fabrication of Three-dimensional Ceramic Structuresen_US
dc.typeConference paperen_US

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2011 International Solid Freeform Fabrication Symposium