Flexure based macro motion translation stage

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Date

2011-09-13

Authors

Sidlgata V. Sreenivasan
Byung J. Choi

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United States Patent and Trademark Office

Abstract

Described are flexure-based high precision positioning stages. The stages are constrained to motion along each axis by a system of symmetrical flexure linkages. The linkages may be formed of link coupled by flexure joints. Magnetic linear servomotors may provide motive force for the stages. In some embodiments, the stages may have no frictional contact joints.

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