Flexure based macro motion translation stage

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorSidlgata V. Sreenivasan
dc.creatorByung J. Choi
dc.date.accessioned2019-10-23T19:31:25Z
dc.date.available2019-10-23T19:31:25Z
dc.date.filed2001-08-21
dc.date.issued2011-09-13
dc.description.abstractDescribed are flexure-based high precision positioning stages. The stages are constrained to motion along each axis by a system of symmetrical flexure linkages. The linkages may be formed of link coupled by flexure joints. Magnetic linear servomotors may provide motive force for the stages. In some embodiments, the stages may have no frictional contact joints.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber9934248
dc.identifier.patentnumber8016277
dc.identifier.urihttps://hdl.handle.net/2152/77061
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/4150
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F7/707
dc.subject.cpcG03F7/70716
dc.subject.cpcG03F7/70758
dc.subject.cpcH01L21/682
dc.subject.uspc269/58
dc.subject.uspc269/71
dc.subject.uspc33/568
dc.titleFlexure based macro motion translation stage
dc.typePatent

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