Using chemical vapor deposited films to control domain orientation in block copolymer thin films
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Date
2019-01-01
Authors
Wilson, C. Grant
Seshimo, Takehiro
Durand, William J.
Ellison, Christopher John
Bates, Christopher M.
Cushen, Julia
Santos, Logan J.
Dean, Leon
Rausch, Erica L.
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns.