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dc.creatorC. Grant Wilson
dc.creatorTakehiro Seshimo
dc.creatorWilliam J. Durand
dc.creatorChristopher John Ellison
dc.creatorChristopher M. Bates
dc.creatorJulia Cushen
dc.creatorLogan J. Santos
dc.creatorLeon Dean
dc.creatorErica L. Rausch
dc.date.accessioned2019-10-23T14:07:04Z
dc.date.available2019-10-23T14:07:04Z
dc.date.issued2019-01-01
dc.identifier.urihttps://hdl.handle.net/2152/76530
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3619
dc.description.abstractVacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns.
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.titleUsing chemical vapor deposited films to control domain orientation in block copolymer thin films
dc.typePatent
dc.description.departmentBoard of Regents, University of Texas System
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.date.filed2015-04-28
dc.subject.cpcB29C43/32
dc.subject.cpcB81C1/00031
dc.subject.cpcB81C2201/0149
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcC03C17/30
dc.subject.cpcC03C17/3405
dc.subject.cpcC03C2218/152
dc.subject.cpcC09D153/00
dc.subject.cpcC23C16/44
dc.subject.cpcG03F7/0002
dc.subject.cpcY10S977/788
dc.subject.cpcY10S977/809
dc.subject.cpcY10S977/811
dc.subject.cpcY10S977/839
dc.subject.cpcY10S977/888
dc.subject.cpcY10S977/89
dc.subject.cpcY10S977/891
dc.subject.cpcY10T428/24802
dc.subject.cpcY10T428/31504
dc.subject.cpcY10T428/31663
dc.subject.cpcY10T428/31931
dc.identifier.patentnumber10167410
dc.identifier.applicationnumber14698253


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