Using chemical vapor deposited films to control domain orientation in block copolymer thin films
dc.contributor.assignee | Board of Regents, The University of Texas System | |
dc.creator | Wilson, C. Grant | |
dc.creator | Seshimo, Takehiro | |
dc.creator | Durand, William J. | |
dc.creator | Ellison, Christopher John | |
dc.creator | Bates, Christopher M. | |
dc.creator | Cushen, Julia | |
dc.creator | Santos, Logan J. | |
dc.creator | Dean, Leon | |
dc.creator | Rausch, Erica L. | |
dc.date.accessioned | 2019-10-23T14:07:04Z | |
dc.date.available | 2019-10-23T14:07:04Z | |
dc.date.filed | 2015-04-28 | |
dc.date.issued | 2019-01-01 | |
dc.description.abstract | Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns. | |
dc.description.department | Board of Regents, University of Texas System | |
dc.identifier.applicationnumber | 14698253 | |
dc.identifier.patentnumber | 10167410 | |
dc.identifier.uri | https://hdl.handle.net/2152/76530 | |
dc.identifier.uri | http://dx.doi.org/10.26153/tsw/3619 | |
dc.publisher | United States Patent and Trademark Office | |
dc.relation.ispartof | University of Texas Patents | |
dc.relation.ispartof | University of Texas Patents | |
dc.rights.restriction | Open | |
dc.rights.restriction | Open | |
dc.subject.cpc | B29C43/32 | |
dc.subject.cpc | B81C1/00031 | |
dc.subject.cpc | B81C2201/0149 | |
dc.subject.cpc | B82Y10/00 | |
dc.subject.cpc | B82Y40/00 | |
dc.subject.cpc | C03C17/30 | |
dc.subject.cpc | C03C17/3405 | |
dc.subject.cpc | C03C2218/152 | |
dc.subject.cpc | C09D153/00 | |
dc.subject.cpc | C23C16/44 | |
dc.subject.cpc | G03F7/0002 | |
dc.subject.cpc | Y10S977/788 | |
dc.subject.cpc | Y10S977/809 | |
dc.subject.cpc | Y10S977/811 | |
dc.subject.cpc | Y10S977/839 | |
dc.subject.cpc | Y10S977/888 | |
dc.subject.cpc | Y10S977/89 | |
dc.subject.cpc | Y10S977/891 | |
dc.subject.cpc | Y10T428/24802 | |
dc.subject.cpc | Y10T428/31504 | |
dc.subject.cpc | Y10T428/31663 | |
dc.subject.cpc | Y10T428/31931 | |
dc.title | Using chemical vapor deposited films to control domain orientation in block copolymer thin films | |
dc.type | Patent |
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