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    • 1997 International Solid Freeform Fabrication Symposium
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    Gas Phase SFF Control System for Silicon Nitride Deposition by SALD/SALDV

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    1997-27-Harrison.pdf (671.3Kb)
    Date
    1997
    Author
    Harrison, Shay
    Costa, Chris F.
    Jakubenas, Kevin J.
    Crocker, James E.
    Marcus, Harris L.
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    Abstract
    : A closed-loop laser scanning and temperature control system has been developed for SALD/SALDVI. Temperature control is especially important in SALD/SALDVI because temperature plays a defining role in both composition and deposition rate. The control system for SALD/SALDVI is presented which provides .STL file interpretation, real time temperature control, and laser response modeling, all on a PC. This control system was utilized with the SALD/SALDVI techniques for depositing silicon nitride. Characteristics of ShN4 fabricated shapes are discussed, including composition, morphology, and electrical properties.
    Department
    Mechanical Engineering
    Subject
    SALD
    TMS
    URI
    http://hdl.handle.net/2152/70347
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    • 1997 International Solid Freeform Fabrication Symposium

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