Transient charging processes at liquid-solid and vacuum-solid interfaces

dc.contributor.advisorHwang, Gyeongen
dc.creatorKenney, Jason Andrewen
dc.date.accessioned2008-08-28T23:48:45Zen
dc.date.available2008-08-28T23:48:45Zen
dc.date.issued2006en
dc.description.abstractThe behavior of transient charging processes at interfaces has become increasingly important in the manufacture of materials on the micron-scale and below. Herein, the modeling and simulation of processes occurring at liquid-solid and vacuum-solid interfaces are considered. For the liquid-solid interface, an electrochemical machining system is modeled using equivalent circuits. Comparisons are then made between experimental and model results for transient current response and machining resolution. Predictions are given regarding the use of complex electrode shapes. For the vacuum-solid interface, surface charging of dielectric under plasma bombardment is considered. A high aspect ratio structure with varying absolute dimension is used with a bimodal ion energy distribution, and the resulting fluxes and energies of ions investigated.
dc.description.departmentChemical Engineeringen
dc.format.mediumelectronicen
dc.identifier.oclc182548769en
dc.identifier.urihttp://hdl.handle.net/2152/3454en
dc.language.isoengen
dc.rightsCopyright © is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subject.lcshTransients (Electricity)en
dc.subject.lcshInterfaces (Physical sciences)en
dc.subject.lcshPlasma (Ionized gases)--Conductivityen
dc.subject.lcshIonsen
dc.titleTransient charging processes at liquid-solid and vacuum-solid interfacesen
dc.type.genreThesisen
thesis.degree.departmentChemical Engineeringen
thesis.degree.disciplineChemical Engineeringen
thesis.degree.grantorThe University of Texas at Austinen
thesis.degree.levelDoctoralen
thesis.degree.nameDoctor of Philosophyen

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