Device for holding a template for use in imprint lithography

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorCarlton Willson
dc.creatorJohn G. Ekerdt
dc.creatorSidlgata V. Sreenivasan
dc.creatorMatthew E. Colburn
dc.creatorByung-Jin Choi
dc.creatorTodd C. Bailey
dc.date.accessioned2019-10-23T19:31:27Z
dc.date.available2019-10-23T19:31:27Z
dc.date.filed2010-03-02
dc.date.issued2011-10-11
dc.description.abstractAn imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber12715915
dc.identifier.patentnumber8033814
dc.identifier.urihttps://hdl.handle.net/2152/77065
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/4154
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB29C35/0888
dc.subject.cpcB29C37/0053
dc.subject.cpcB29C43/003
dc.subject.cpcB29C2035/0827
dc.subject.cpcB29C2043/025
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F9/00
dc.subject.cpcG11B5/855
dc.subject.cpcY10S977/887
dc.subject.uspc101/28
dc.subject.uspc355/75
dc.subject.uspc425/385
dc.subject.uspc977/887
dc.titleDevice for holding a template for use in imprint lithography
dc.typePatent

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