Using chemical vapor deposited films to control domain orientation in block copolymer thin films

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorWillson, C. Grant
dc.creatorSeshimo, Takehiro
dc.creatorDurand, William J.
dc.creatorEllison, Christopher John
dc.creatorBates, Christopher M.
dc.creatorCushen, Julia
dc.creatorSantos, Logan J.
dc.creatorDean, Leon
dc.creatorRausch, Erica L.
dc.date.accessioned2019-10-23T14:33:15Z
dc.date.available2019-10-23T14:33:15Z
dc.date.filed2013-02-07
dc.date.issued2015-05-26
dc.description.abstractVacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber13761324
dc.identifier.patentnumber9040121
dc.identifier.urihttps://hdl.handle.net/2152/76664
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3753
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB29C43/32
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dc.titleUsing chemical vapor deposited films to control domain orientation in block copolymer thin films
dc.typePatent

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