Processing issues of Germanium MOS devices on silicon substrates
| dc.contributor.advisor | Banerjee, Sanjay | |
| dc.creator | Joshi, Sachin Vineet | |
| dc.date.accessioned | 2019-12-02T23:33:14Z | |
| dc.date.available | 2019-12-02T23:33:14Z | |
| dc.date.issued | 2004-08-16 | |
| dc.description.abstract | As conventional scaling approaches its limits, novel materials are increasingly being explored for continuing the exponential growth predicted by Moore's law. Germanium and high K gate dielectrics are currently the subject of extensive study. This work is an initial report about the challenges and opportunities in the integration of compressively strained Germanium films and high k gate dielectrics onto conventional silicon substrates for faster MOS devices. A novel MOS device structure with a thin, meta-stable Ge film in the channel region and a high k gate dielectric material is explored for its thermodynamic instability. | en_US |
| dc.description.department | Electrical and Computer Engineering | en_US |
| dc.format.medium | electronic | en_US |
| dc.identifier.uri | https://hdl.handle.net/2152/78624 | |
| dc.identifier.uri | http://dx.doi.org/10.26153/tsw/5680 | |
| dc.language.iso | eng | en_US |
| dc.relation.ispartof | UT Electronic Theses and Dissertations | en_US |
| dc.rights | Copyright © is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works. | en_US |
| dc.rights.restriction | Restricted | en_US |
| dc.subject | Germanium film | en_US |
| dc.subject | MOS devices | en_US |
| dc.subject | Thermal stability | en_US |
| dc.title | Processing issues of Germanium MOS devices on silicon substrates | en_US |
| dc.type | Thesis | en_US |
| dc.type.genre | Thesis | en_US |
| thesis.degree.department | Electrical and Computer Engineering | en_US |
| thesis.degree.discipline | Electrical and Computer Engineering | en_US |
| thesis.degree.grantor | University of Texas at Austin | en_US |
| thesis.degree.level | Masters | en_US |
| thesis.degree.name | Master of Science in Engineering. | en_US |