The LMP Process: Layered Metal Prototyping of Titanium from Condensed Thin-Films for Microelectromechanical Devices

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dc.creatorMaxwell, James
dc.creatorBorse, Sandesh
dc.date.accessioned2018-12-06T21:05:50Z
dc.date.available2018-12-06T21:05:50Z
dc.date.issued1997
dc.description.abstractLayered prototyping of three-dimensional titanium micromechanical components was demonstrated using selected area laser photolysis of liquid-phase organo-metallic and metal halide thin films. Scanning KrF and XeF excimer lasers were employed at 248 and 351 nm, respectively, generating solid titanium traces from condensed precursor films. Multiple layers were patterned to produce high-aspect ratio titanium lines. Laser pulse repetition rate, scan rate, pulse energy, and layer thickness were related to the resulting layer topography. This process is a first step toward layered metal rapid prototyping ofelectronic packaging microstructures and microelectromechanical systems.en_US
dc.description.departmentMechanical Engineeringen_US
dc.identifierdoi:10.15781/T29W09K05
dc.identifier.urihttp://hdl.handle.net/2152/71428
dc.language.isoengen_US
dc.relation.ispartof1997 International Solid Freeform Fabrication Symposiumen_US
dc.rights.restrictionOpenen_US
dc.subjectmicromachiningen_US
dc.subjectexcimer lasersen_US
dc.titleThe LMP Process: Layered Metal Prototyping of Titanium from Condensed Thin-Films for Microelectromechanical Devicesen_US
dc.typeConference paperen_US

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1997 International Solid Freeform Fabrication Symposium