System for creating a turbulent flow of fluid between a mold and a substrate

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dc.contributor.assigneeMolecular Imprints, Inc.
dc.contributor.assigneeThe Board of Regents of the University of Texas System
dc.creatorNicholas A. Stacey
dc.creatorDaniel A. Babbs
dc.creatorRonald D. Voisin
dc.creatorDuane J. Voth
dc.creatorFrank Y. Xu
dc.creatorPankaj B. Lad
dc.creatorIan McMackin
dc.creatorVan N. Truskett
dc.creatorMathew P. Watts
dc.date.accessioned2019-10-23T19:33:07Z
dc.date.available2019-10-23T19:33:07Z
dc.date.filed2004-07-23
dc.date.issued2007-09-18
dc.description.abstractThe present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber10898037
dc.identifier.patentnumber7270533
dc.identifier.urihttps://hdl.handle.net/2152/77148
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/4237
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcY10S425/06
dc.subject.cpcY10S425/815
dc.subject.cpcY10S438/909
dc.subject.uspc425/387.1
dc.subject.uspc425/385
dc.subject.uspc425/405.1
dc.titleSystem for creating a turbulent flow of fluid between a mold and a substrate
dc.typePatent

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