Method to control the relative position between a body and a surface
dc.contributor.assignee | Board of Regents, The University of Texas System | |
dc.creator | Sidlgata V. Sreenivasan | |
dc.creator | Stephen C. Johnson | |
dc.creator | Byung-Jin Choi | |
dc.date.accessioned | 2019-10-23T19:26:25Z | |
dc.date.available | 2019-10-23T19:26:25Z | |
dc.date.filed | 2004-02-24 | |
dc.date.issued | 2005-10-18 | |
dc.description.abstract | A method to control a relative position between a surface and a body to form a pattern in the surface that features moving a body to obtain a desired relationship between the surface and the body. To that end, the method includes sensing the surface and the body and moving that body to obtain a desired spatial relationship with the surface. | |
dc.description.department | Board of Regents, University of Texas System | |
dc.identifier.applicationnumber | 10785248 | |
dc.identifier.patentnumber | 6955868 | |
dc.identifier.uri | https://hdl.handle.net/2152/76833 | |
dc.identifier.uri | http://dx.doi.org/10.26153/tsw/3922 | |
dc.publisher | United States Patent and Trademark Office | |
dc.relation.ispartof | University of Texas Patents | |
dc.relation.ispartof | University of Texas Patents | |
dc.rights.restriction | Open | |
dc.rights.restriction | Open | |
dc.subject.cpc | B82Y10/00 | |
dc.subject.cpc | B82Y40/00 | |
dc.subject.cpc | G03F9/00 | |
dc.subject.cpc | G03F7/0002 | |
dc.subject.uspc | 355/72 | |
dc.subject.uspc | 396/428 | |
dc.subject.uspc | 430/22 | |
dc.subject.uspc | 430/30 | |
dc.title | Method to control the relative position between a body and a surface | |
dc.type | Patent |
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