A bidirectional MEMS thermal actuator as the building block for a programmable metamaterial

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dc.contributor.advisorCullinan, Michael
dc.creatorZhao, Cheng, M.S. in Engineering
dc.creator.orcid0000-0001-6757-4111
dc.date.accessioned2021-03-19T23:34:21Z
dc.date.available2021-03-19T23:34:21Z
dc.date.created2018-08
dc.date.issued2018-10-04
dc.date.submittedAugust 2018
dc.date.updated2021-03-19T23:34:22Z
dc.description.abstractThis thesis presents a novel bidirectional MEMS thermal actuator that is intended to be implemented as the building block for a microarchitectured material. The successful proof of concept demonstrates the potential for a new level of miniaturization for the technology that would improve existing capabilities and enable new ones. The design is built upon the bent-beam type thermal actuators with an emphasis on large travel and force output. Sensing capabilities are accomplished through piezoresistive strain gauges that provide sufficient sensitivity and resolution. An analytical model was created to calculate the performance parameters of actuator designs and was used in conjunction with optimization software to arrive at four selected designs with minimal theoretical trade-offs. Successful fabrication of the devices was achieved with standard microfabrication techniques. Preliminary testing results have demonstrated the successful operation of bidirectional actuation and confirms the validity of the concept
dc.description.departmentMechanical Engineering
dc.format.mimetypeapplication/pdf
dc.identifier.urihttps://hdl.handle.net/2152/85050
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/12020
dc.language.isoen
dc.subjectMEMS
dc.subjectThermal actuator
dc.subjectFEM
dc.subjectFEA
dc.subjectMicrofabrication
dc.subjectSemiconductor
dc.subjectOptimization
dc.subjectPiezoresistive strain gauge
dc.titleA bidirectional MEMS thermal actuator as the building block for a programmable metamaterial
dc.typeThesis
dc.type.materialtext
thesis.degree.departmentMechanical Engineering
thesis.degree.disciplineMechanical Engineering
thesis.degree.grantorThe University of Texas at Austin
thesis.degree.levelMasters
thesis.degree.nameMaster of Science in Engineering

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