Anhydride copolymer top coats for orientation control of thin film block copolymers

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorSleshimo, Takehiro
dc.creatorWillson, C. Grant
dc.creatorEllison, Christopher John
dc.creatorBates, Christopher M.
dc.creatorCushen, Julia
dc.creatorSantos, Logan J.
dc.creatorDean, Leon
dc.creatorRausch, Erica L.
dc.date.accessioned2019-10-23T14:07:03Z
dc.date.available2019-10-23T14:07:03Z
dc.date.filed2015-08-28
dc.date.issued2018-11-27
dc.description.abstractThe concepts described herein involve the use of random copolymer top coats that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films. Top coats potentially allow for the facile orientation control of block copolymers which would otherwise be quite challenging.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber14839147
dc.identifier.patentnumber10139724
dc.identifier.urihttps://hdl.handle.net/2152/76527
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3616
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB05D1/005
dc.subject.cpcB05D5/00
dc.subject.cpcB05D7/52
dc.subject.cpcB05D7/56
dc.subject.cpcB05D2252/02
dc.subject.cpcB81C1/00031
dc.subject.cpcB81C2201/0149
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcC09D137/00
dc.subject.cpcC09D167/00
dc.subject.cpcG03F1/50
dc.subject.cpcG03F7/0002
dc.subject.cpcY10T428/24802
dc.subject.cpcY10T428/31663
dc.subject.cpcY10T428/31855
dc.titleAnhydride copolymer top coats for orientation control of thin film block copolymers
dc.typePatent

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