Growth optimization of WSe₂ and its sulfurization to WS₂

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2019-07-09

Authors

Liu, Chison Qishan

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Abstract

Tungsten diselenide has gained much interest within recent years after it was reported to have both p-type and ambipolar transport properties. And because most other transition metal dichalcogenides exhibit n-type transport properties, tungsten diselenide would help to further realize CMOS technology if one could find a more reliable way to synthesize it in large areas with high quality crystallinity. In this report I will be detailing my work on successfully synthesizing WSe₂, its sulfurization into WS₂, and discussing what I’ve observed in both the crystal quality and growth mechanisms. My goal is to provide a better understanding of the growth process in hopes of moving forward with improving future growth recipes

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