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    High-resolution overlay alignment methods for imprint lithography

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    US6921615.pdf (4.214Mb)
    Date
    2005-07-26
    Author
    Sidlgata V. Sreenivasan
    Matthew E. Colburn
    Todd Bailey
    Byung J. Choi
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    Abstract
    A method of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
    Department
    Board of Regents, University of Texas System
    URI
    https://hdl.handle.net/2152/76829
    http://dx.doi.org/10.26153/tsw/3918
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