Branched siloxanes and methods for synthesis
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Date
2016-09-06
Authors
Ogawa, Tsuyoshi
Willson, C. Grant
Jacobsson, Michael B.
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.