Surface treatments for alignment of block copolymers
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Date
2015-09-01
Authors
Willson, C. Grant
Ellison, Christopher John
Bates, Christopher M.
Strahan, Jeffrey
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
The present invention relates to a method the synthesis and utilization of random, cross-linked, substituted polystyrene copolymers as polymeric cross-linked surface treatments (PXSTs) to control the orientation of physical features of a block copolymer deposited over the first copolymer. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.