Surface treatments for alignment of block copolymers

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Date

2015-09-01

Authors

Willson, C. Grant
Ellison, Christopher John
Bates, Christopher M.
Strahan, Jeffrey

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United States Patent and Trademark Office

Abstract

The present invention relates to a method the synthesis and utilization of random, cross-linked, substituted polystyrene copolymers as polymeric cross-linked surface treatments (PXSTs) to control the orientation of physical features of a block copolymer deposited over the first copolymer. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.

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