Multi-Material and Advanced Geometry Deposition via Laser Chemical Vapor Deposition
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Date
2002
Authors
Bondi, Scott N.
Johnson, Ryan W.
Eikhatib, Tarek
Gillespie, Josh
Mi, Jian
Lackey, W. Jack
Journal Title
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Abstract
Laser Chemical Vapor Deposition (LCVD) as a manufacturing process holds the potential to build compositionally and geometrically unique objects. Georgia Tech’s LCVD system has been used in the past to create three-dimensional and laminate structures out of carbon. Recently molybdenum and boron nitride were successfully deposited and upgrades to the system have allowed for higher spatial resolutions and more varied geometric capabilities. Upgrades include the addition of a fourth linear stage and implementation of an argon ion laser. Detailed thermal and fluid modeling have provided more insight as to the important parameters and characteristics of the LCVD process.