Anhydride copolymer top coats for orientation control of thin film block copolymers

dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorCarlton Willson
dc.creatorTakehiro Seshimo
dc.creatorChristopher John Ellison
dc.creatorChristopher M. Bates
dc.creatorJulia Cushen
dc.creatorLogan J. Santos
dc.creatorLeon Dean
dc.creatorErica L. Rausch
dc.creatorMichael Maher
dc.date.accessioned2019-10-23T14:33:39Z
dc.date.available2019-10-23T14:33:39Z
dc.date.filed2013-06-19
dc.date.issued2016-04-19
dc.description.abstractThe use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae perpendicular to the plane of the block copolymer film is required for most applications. The preferred method to achieve orientation is by heating. The present invention involves the use of polarity-switching top coats to control block copolymer thin film orientation by heating. The top coats can be spin coated onto block copolymer thin films from polar casting solvents and they change composition upon thermal annealing to become “neutral”. Top coats allow for the facile orientation control of block copolymers which would otherwise not be possible by heating alone.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber13922011
dc.identifier.patentnumber9314819
dc.identifier.urihttps://hdl.handle.net/2152/76721
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3810
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB05D7/56
dc.subject.cpcB05D1/005
dc.subject.cpcB05D5/00
dc.subject.cpcB05D7/52
dc.subject.cpcB05D2252/02
dc.subject.cpcB81C1/00031
dc.subject.cpcB81C2201/0149
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcC09D137/00
dc.subject.cpcG03F7/0002
dc.subject.uspcNo longer published
dc.titleAnhydride copolymer top coats for orientation control of thin film block copolymers
dc.typePatent

Access full-text files

Original bundle

Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
US9314819.pdf
Size:
1.46 MB
Format:
Adobe Portable Document Format