Step and flash imprint lithography

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorCarlton Willson
dc.creatorMatthew E. Colburn
dc.date.accessioned2019-10-23T19:26:08Z
dc.date.available2019-10-23T19:26:08Z
dc.date.filed2001-07-19
dc.date.issued2004-04-13
dc.description.abstractA method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such that the polymerizable fluid composition fills the relief structure in the mold. The polymerizable fluid composition is subjected to conditions to polymerize polymerizable fluid composition and form a solidified polymeric material therefrom on the transfer layer. The mold is then separated from the solid polymeric material such that a replica of the relief structure in the mold is formed in the solidified polymeric material; and the transfer layer and the solidified polymeric material are subjected to an environment to selectively etch the transfer layer relative to the solidified polymeric material such that a relief image is formed in the transfer layer.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber9908765
dc.identifier.patentnumber6719915
dc.identifier.urihttps://hdl.handle.net/2152/76799
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3888
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB29C43/003
dc.subject.cpcB29C43/021
dc.subject.cpcB29C2043/025
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcH05K3/061
dc.subject.cpcY10S977/887
dc.subject.cpcY10S977/897
dc.subject.uspc216/44
dc.subject.uspc216/52
dc.subject.uspc216/67
dc.subject.uspc216/72
dc.titleStep and flash imprint lithography
dc.typePatent

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