Method for fabricating a pressure sensor

dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorTushar Sharma
dc.creatorXiaojing Zhang
dc.date.accessioned2019-10-23T14:06:48Z
dc.date.available2019-10-23T14:06:48Z
dc.date.filed2014-10-24
dc.date.issued2018-06-19
dc.description.abstractA method of fabricating a pressure sensor is disclosed. Initially, a first metal is deposited on top of a substrate, and the first metal is patterned accordingly. A PVDF-TrFE nano fiber is then deposited on top of the first metal layer, and the PVDF-TrFE nano fiber is etched. A second metal layer is subsequently deposited on top of the PVDF-TrFE nano fiber, and the second metal layer is etched to form a pressure sensor.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber15030301
dc.identifier.patentnumber10001421
dc.identifier.urihttps://hdl.handle.net/2152/76500
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3589
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcG01L1/16
dc.subject.cpcG01L9/008
dc.subject.cpcG01L9/08
dc.subject.cpcH01L41/087
dc.subject.cpcH01L41/1132
dc.subject.cpcH01L41/193
dc.subject.cpcH01L41/22
dc.subject.cpcH01L41/29
dc.subject.cpcH01L41/314
dc.subject.cpcH01L41/332
dc.titleMethod for fabricating a pressure sensor
dc.typePatent

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