Method for fabricating a pressure sensor
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Date
2018-06-19
Authors
Tushar Sharma
Xiaojing Zhang
Journal Title
Journal ISSN
Volume Title
Publisher
United States Patent and Trademark Office
Abstract
A method of fabricating a pressure sensor is disclosed. Initially, a first metal is deposited on top of a substrate, and the first metal is patterned accordingly. A PVDF-TrFE nano fiber is then deposited on top of the first metal layer, and the PVDF-TrFE nano fiber is etched. A second metal layer is subsequently deposited on top of the PVDF-TrFE nano fiber, and the second metal layer is etched to form a pressure sensor.