Generation of Micro Mechanical Devices Using Stereo Lithography

A high resolution machining setup for creating three-dimensional precision components from a UV-curable photo-resin has been developed. By using frequency-converted diode-pumped solid state lasers, functional micro-mechanical devices are directly fabricated in a successive layer-bylayer fashion. Within this paper, the direct generation of micro assemblies having moving components without further assembly of parts will be presented. The micro system design is based on user-defined 3D-CAD data and will completively be built up within the fabrication cycle. By using specially developed μSL materials with suitable properties for micromechanical parts, the development from Rapid Prototyping towards Rapid Production of small series is intended.