Porous and non-porous nanostructures

Simple item page
dc.contributor.assigneeThe Board of Regents of the University of Texas System
dc.creatorMauro Ferrari
dc.creatorXuewu Liu
dc.creatorCiro Chiappini
dc.creatorJean Raymond Fakhoury
dc.date.accessioned2019-10-23T14:07:01Z
dc.date.available2019-10-23T14:07:01Z
dc.date.filed2011-03-09
dc.date.issued2013-10-29
dc.description.abstractDisclosed are a variety of porous and non-porous wire-like structures of microscopic and nanoscopic scale. For instance, disclosed are structures that comprise a porous object that comprises: (i) a first region; and (ii) a second region adjacent to the first region along an axis of the object, where the first region has at least one porous property different from that of the second region. Also disclosed are structures that include: (i) a high resistivity silicon; and (ii) a cross-section that is substantially perpendicular to an axis of the object. Also disclosed are methods of making and using such structures. For instance, the present invention provides methods of making a porous object by: (i) obtaining an etchable substrate; (ii) forming on a surface of the substrate a patterned porosification assisting metal layer that has at least one opening; and (iii) subsequently exposing the substrate to a first etching solution and a second etching solution to form respectively a first region and a second region of a porous object.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber13044250
dc.identifier.patentnumber8568877
dc.identifier.urihttps://hdl.handle.net/2152/76525
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3614
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y30/00
dc.subject.cpcB82Y40/00
dc.subject.cpcH01L29/0665
dc.subject.cpcH01L2924/0002
dc.subject.cpcH01L2924/00
dc.subject.cpcY10T428/2982
dc.subject.uspc428/402
dc.subject.uspc438/690
dc.subject.uspc438/695
dc.titlePorous and non-porous nanostructures
dc.typePatent

Access full-text files

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
US8568877.pdf
Size:
8.19 MB
Format:
Adobe Portable Document Format
Download

Collections

University of Texas Patents