Method of aerosol jet etching

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorJames R. Brock
dc.creatorIsaac Trachtenberg
dc.date.accessioned2019-10-23T21:44:49Z
dc.date.available2019-10-23T21:44:49Z
dc.date.filed1988-12-21
dc.date.issued1990-11-27
dc.description.abstractA device and method for etching a body are provided capable of etching fine geometry patterns utilizing the high selectivity of wet etching and the anisotropic etch characteristics of dry etching. The body to be etched is placed in a reduced pressure etching chamber. An inert carrier gas is bubbled through heated liquid etchant producing a vapor stream of liquid etchant. A non-reactive gas is chilled producing a cold gas stream. The vapor stream and the cold gas stream are combined in an aerosol generation nozzle producing a high concentration of fine aerosol particles by homogeneous nucleation. The fine aerosol particles enter an aerosol growth chamber and form larger particles through thermal coagulation. The larger particles are accelerated out of the growth chamber through an expansion nozzle positioned within the reduced pressure etching chamber and directed toward the body to be etched. This aerosol jet of etchant impacts the surface of the body to be etched. The small size of these larger particles allows for etching fine geometry patterns. Additionally, aerosol jet etching avoids the need to rinse the body after being etched as required in wet etching to halt the etching process.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber7289642
dc.identifier.patentnumber4973379
dc.identifier.urihttps://hdl.handle.net/2152/77348
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/4437
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcC23F1/08
dc.subject.cpcC23F1/12
dc.subject.uspc239/13
dc.subject.uspc438/748
dc.titleMethod of aerosol jet etching
dc.typePatent

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