Selective Area Laser Deposition from Titanium Tetrachloride

Selective Area Laser Deposition (SALD) has demonstrated the ability to deposit controlled shapes of silicon carbide and silicon nitride by using a laser beam to decompose a precursor gas. The goal of the work here is to include titanium among the list of SALD materials, although this goal has not yet been reached. This paper describes the selection of precursors and the results of some SALD experiments using the first precursor explored, titanium tetrachloride. The results of precursor gas mixture, pressure, and laser power on deposition composition and rates are discussed.