Method of aligning a template with a substrate employing moire patterns

dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorSidlgata V. Sreenivasan
dc.creatorMatthew E. Colburn
dc.creatorTodd Bailey
dc.creatorByung J. Choi
dc.date.accessioned2019-10-23T19:26:27Z
dc.date.available2019-10-23T19:26:27Z
dc.date.filed2004-04-05
dc.date.issued2006-01-17
dc.description.abstractThe present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber10818099
dc.identifier.patentnumber6986975
dc.identifier.urihttps://hdl.handle.net/2152/76838
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3927
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB29C35/0888
dc.subject.cpcB29C37/0053
dc.subject.cpcB29C43/003
dc.subject.cpcB29C43/021
dc.subject.cpcB29C2035/0827
dc.subject.cpcB29C2043/025
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F9/00
dc.subject.cpcY10S101/36
dc.subject.cpcY10T428/24802
dc.subject.uspc430/22
dc.subject.uspc430/30
dc.titleMethod of aligning a template with a substrate employing moire patterns
dc.typePatent
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