Planarizing Material For Reverse-Tone Step And Flash Imprint Lithography

Date
2010
Authors
Ogawa, Tsuyoshi
Takei, Satoshi
Jacobsson, B. Michael
Deschner, Ryan
Bell, William
Lin, Michael W.
Hagiwara, Yuji
Hanabata, Makoto
Willson, C. Grant
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Abstract

Reverse-tone Step and Flash Imprint Lithography (S-FIL/R) requires materials that can be spin coated onto patterned substrates with significant topography and that are highly-planarizing. Ideally, these planarizing materials must contain silicon for etch selectivity, be UV or thermally curable, have low viscosity, and low volatility. One such novel material in particular, a branched and functionalized siloxane (Si-12), is able to adequately satisfy the above requirements. This paper describes a study of the properties of epoxy functionalized Si-12 (epoxy-Si-12) as a planarizing layer. An efficient synthetic route to epoxy-Si-12 was successfully developed, which is suitable and scalable for an industrial process. Epoxy-Si-12 has a high silicon content (30.0 %), low viscosity (29 cP @ 25 degrees C), and low vapor pressure (0.65 Torr @ 25 degrees C). A planarizing study was carried out using epoxy-Si-12 on trench patterned test substrates. The material showed excellent planarizing properties and met the calculated critical degree of planarization (critical DOP), which is a requirement for a successful etch process. An S-FIL/R process using epoxy-Si-12 was demonstrated using, an Imprio (R) 100 (Molecular Imprints Inc., USA) imprint tool. The results indicate that epoxy-Si-12 works very well as a planarizing layer for S-FIL/R.

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Citation
Tsuyoshi Ogawa, Satoshi Takei, B. Michael Jacobsson, Ryan Deschner, William Bell, Michael W. Lin, Yuji Hagiwara, Makoto Hanabata, C. Grant Willson. SPIE 7637, Planarizing Material For Reverse-Tone Step And Flash Imprint Lithography. Alternative Lithographic Technologies II, 763708 (Apr. 2010); doi:10.1117/12.846430.