Fabrication of Nanoimprinting Molds with Acrylic Polymer by Two-Photon Polymerization

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Date

2009-09-24

Authors

Zhang, Wande
Han, Li-Hsin
Chen, Shaochen

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Publisher

University of Texas at Austin

Abstract

We demonstrate the plausibility of making low-cost nanoimprinting molds with acrylic polymer using femtosecond-laser-induced two-photon polymerization (TPP) technique. A Ti:sapphire femtosecond laser was used to induce TPP in dipentaerythritol pentaacrylate to make nanostructures, the nanoimprinting mold, on pretreated glass substrate. A layer of fluoro-silane was then grown on the surface of the mold to promote the release of the mold after imprinting. To test the imprinting capacity of the mold, poly (ethylene glycol) diacrylate was patterned by the mold and the results were analyzed by a scanning electron microscope (SEM).

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