Gas-Phase Selective Area Laser Deposition(SALD) Joining of SiC Tubes with SiC Filler Materia

Access full-text files

Date

1998

Authors

Harrison, S.
Marcus, H.L.

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

The laser-driven, gas-phase based SFF technique for joining together ceramic components with ceramic filler material, known as Selective Area Laser Deposition(SALD) Joining, was utilized in fabricating joined silicon carbide structures. Specifically, silicon carbide tubes were 'welded' together by depositing silicon carbide from a gas phase reaction. Two different precursor environments were examined, one a tetramethylsilane/hydrogen mixture and the other composed of methyltrichlorosilane. The quality of the joints were examined by bend tests and hermeticity measurements. In addition, the composition and morphology of the silicon carbide deposit was studied and is discussed here

Description

LCSH Subject Headings

Citation