Adaptive shape substrate support method

dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorMahadevan GanapathiSubramanian
dc.creatorSldlgata V. Sreenivasan
dc.date.accessioned2019-10-23T19:30:48Z
dc.date.available2019-10-23T19:30:48Z
dc.date.filed2005-05-25
dc.date.issued2009-03-17
dc.description.abstractThe present method features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the method includes creating a point contact on the first surface to generate a change in shape of the second surface to obtain a desired shape of the second surface. The desired shape may be smooth, if not substantially planar or any other shape desired within the operational parameters of the chuck and the substrate. For example, the method may compensate for non-planarity due to particulate matter on the first surface and substrate topography. These and other embodiments are discussed more fully below.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber11136892
dc.identifier.patentnumber7504268
dc.identifier.urihttps://hdl.handle.net/2152/76986
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/4075
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F7/707
dc.subject.uspc257/E21.002
dc.subject.uspc310/328
dc.subject.uspc438/5
dc.subject.uspc438/14
dc.titleAdaptive shape substrate support method
dc.typePatent

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