Micro Thin Film Sensor Embedding in Metal Structures for Rapid Production of Miniature Smart Metal Tooling

dc.creatorCheng, Xudong
dc.creatorSchwieso, Patrick
dc.creatorChoi, Hongseok
dc.creatorDatta, Arindom
dc.creatorLi, Xiaochun
dc.date.accessioned2020-02-13T20:54:10Z
dc.date.available2020-02-13T20:54:10Z
dc.date.issued2004-08-30
dc.description.abstractIn-situ monitoring and control of temperature and strain is important to improve product quality for numerous mesoscale manufacturing processes. However, it is difficult for conventional sensors to provide measurements with a high spatial and temporal resolution at critical locations. This paper studies the fabrication and calibration of micro thin film sensors embedded in metal structures for miniature tooling applications. Micro thin film sensors have been successfully fabricated on various metal substrates and advanced embedding techniques have been developed to ensure sensor function inside metal structures. Specifically, multilayer dielectric/metal thin film micro sensors were embedded into layered metal structures by ultrasonic welding (USW). These embedded sensors provided superior spatial and temporal resolutions. Smart tooling technique will improve safety and reliability significantly for manufacturing processes.en_US
dc.description.departmentMechanical Engineeringen_US
dc.identifier.urihttps://hdl.handle.net/2152/79977
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/7002
dc.relation.ispartof2004 International Solid Freeform Fabrication Symposiumen_US
dc.rights.restrictionOpenen_US
dc.subjectprocess monitoringen_US
dc.titleMicro Thin Film Sensor Embedding in Metal Structures for Rapid Production of Miniature Smart Metal Toolingen_US
dc.typeConference paperen_US
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