Method of determining alignment of a template and a substrate having a liquid disposed therebetween

Date
2007-03-06
Authors
Sidlgata V. Sreenivasan
Matthew E. Colburn
Byung-Jin Choi
Todd C. Bailey
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Publisher
United States Patent and Trademark Office
Abstract

The present invention includes a method of aligning a substrate and a template spaced-apart from the substrate with an activating light curable liquid disposed therebetween, the substrate having substrate alignment marks and the template having template alignment marks, the method including, reducing a distance between the substrate and the template to cause a spreading of the activating light curable liquid; and varying an overlay placement of the template with respect to the substrate such that the template alignment marks are substantially aligned with the substrate alignment marks before the spreading causes the activating light curable liquid to cover an area between the substrate alignment marks and the template alignment marks.

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