Construction of a surface science system for the study of reactive ballistic deposited thin films

This thesis discusses the construction and modification of an ultra-high vacuum chamber (UHV) and associated instruments for the study of thin film materials prepared by reactive ballistic deposition. In addition to hardware design and construction, the fabrication of an electron beam evaporator and its associated controls, along with an application of a computer based lock in amplification routine to Auger Electron Spectroscopy are discussed.