Surface chemistry and directed assembly of nanostructures on dielectric surfaces

dc.contributor.advisorEkerdt, John G.en
dc.creatorStanley, Scott Kendylen
dc.date.accessioned2008-08-28T23:09:34Zen
dc.date.available2008-08-28T23:09:34Zen
dc.date.issued2006en
dc.description.abstractSurface chemistry and nanoparticle growth relevant for flash memory applications has been investigated with a number of surface science techniques and imaging methods. Germanium chemistry on SiO2 surfaces is investigated and a series of temperature dependant sequential reactions are identified explaining how Ge reactively etches SiO2 at low temperatures. These reactions hinder the accumulation of Ge adatoms on SiO2 surfaces during chemical vapor deposition (CVD). Germanium is seen to form an unusually stable contacting oxide on HfO2 surfaces and nanoparticles may be grown on HfO2 during CVD. The surface chemistry of Si is also examined on both SiO2 and HfO2 surfaces and Si is seen to be relatively stable on both surfaces, with only slight difference in desorption kinetics. A kinetically-driven patterning scheme was developed to direct the self assembly of nanoparticles within top-down defined regions on the surface by exploiting the reaction kinetics of Si and Ge. Using this method, adatoms are corralled into top-down defined regions where they bottom-up self assemble to form nanoparticles and no nanoparticles form elsewhere. The effect of feature size on the self assembly of nanoparticles is studied and reactive pathways for adatoms in confined spaces are examined.
dc.description.departmentChemical Engineeringen
dc.format.mediumelectronicen
dc.identifierb65503740en
dc.identifier.oclc159934461en
dc.identifier.urihttp://hdl.handle.net/2152/2801en
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subject.lcshSurface chemistryen
dc.subject.lcshNanoparticlesen
dc.subject.lcshDielectrics--Surfacesen
dc.titleSurface chemistry and directed assembly of nanostructures on dielectric surfacesen
dc.type.genreThesisen
thesis.degree.departmentChemical Engineeringen
thesis.degree.disciplineChemical Engineeringen
thesis.degree.grantorThe University of Texas at Austinen
thesis.degree.levelDoctoralen
thesis.degree.nameDoctor of Philosophyen

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