Method of separating a template from a substrate during imprint lithography

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorSidlgata V. Sreenivasan
dc.creatorStephen C. Johnson
dc.creatorByung-Jin Choi
dc.date.accessioned2019-10-23T19:26:19Z
dc.date.available2019-10-23T19:26:19Z
dc.date.filed2003-07-10
dc.date.issued2005-03-22
dc.description.abstractProcesses and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber10617321
dc.identifier.patentnumber6870301
dc.identifier.urihttps://hdl.handle.net/2152/76818
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3907
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F9/00
dc.subject.cpcG03F7/0002
dc.subject.uspc101/463.1
dc.subject.uspc310/311
dc.subject.uspc430/320
dc.titleMethod of separating a template from a substrate during imprint lithography
dc.typePatent

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