Ordering block copolymers

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Date

2017-01-31

Authors

Willson, C. Grant
Ellison, Christopher John
Bates, Christopher M.
Janes, Dustin W.
Maher, Michael

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United States Patent and Trademark Office

Abstract

A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.

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