Substrate support system

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorSidlgata V. Sreenivasan
dc.creatorPawan Kumar Nimmakayala
dc.date.accessioned2019-10-23T19:26:43Z
dc.date.available2019-10-23T19:26:43Z
dc.date.filed2005-05-25
dc.date.issued2007-07-17
dc.description.abstractThe present invention includes a substrate support system that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate that results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber11136885
dc.identifier.patentnumber7245358
dc.identifier.urihttps://hdl.handle.net/2152/76866
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3955
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F7/0002
dc.subject.cpcG03F7/707
dc.subject.cpcG03F7/70783
dc.subject.cpcH01L21/6875
dc.subject.uspc355/72
dc.subject.uspc355/75
dc.titleSubstrate support system
dc.typePatent

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