Substrate support system

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Date

2007-07-17

Authors

Sidlgata V. Sreenivasan
Pawan Kumar Nimmakayala

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United States Patent and Trademark Office

Abstract

The present invention includes a substrate support system that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate that results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.

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