Incorporating CMOS integrated circuits in the design of affinity-based biosensor systems

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Date

2013-08-27

Authors

Arjang Hassibi
Byungchul Jang
Arun Manickam

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United States Patent and Trademark Office

Abstract

A biosensor system incorporating CMOS integrated circuits. In one type of biosensor system, the biosensor system includes a silicon substrate. The biosensor system further includes active devices fabricated on the silicon substrate. Additionally, the biosensor system includes a plurality of metal layers stacked on top of the active devices. Furthermore, the biosensor system includes a passivation layer covering a top metal layer, where the passivation layer includes an opening configured to expose the top metal layer, where the opening is used as a sensing electrode. Additionally, the biosensor system includes a plurality of probes attached to the sensing electrode.

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