Al2O3 Precursor Evaluation for SALD Joining

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Date

2010

Authors

Weiss, C.M.
Marcus, H.L.

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University of Texas at Austin

Abstract

SFF technology is not limited to the creation of components and objects. Freeform technology can be a mechanism for joining of materials. By defining the space between two objects as the boundary for a free-form object it is possible to form a three dimensional joint fill. Selective Area Laser Deposition or SALD, has been used for free form and joining of carbides and nitrides but has the potential to make other classes of ceramics. By selecting a metal-organic precursor and an oxidizer, an oxide can be created by CVD gas decomposition. In this study such oxide joint fill precursors are studied, particularly for alumina.

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