Precision Carbon Deposition Using Pyrolytic Laser Chemical Vapor Deposition (LCVD) 73

Laser Chemical Vapor Deposition (LCVD) can be used to rapid prototype many different metals and ceramics. The spatial resolution is potentially very fine, depending on the accuracy of stage or laser movement, and the size of the laser spot used for the localized heating. This paper describes a set of experiments performed using an LCVD system powered with a 100 Watt CO2 laser. The laser was focused to 200 mm onto a graphite substrate to deposit pyrolytic carbon. The morphologies of the carbon deposits were studied while varying laser power, reagent concentration, scanning speeds, and scanning patterns.