Automated synthesis of fabrication sequence of MEMS components using graph grammars

dc.contributor.advisorCampbell, Matthew I.
dc.creatorJawalkar, Saneet Anant
dc.date.accessioned2017-03-20T15:08:49Z
dc.date.available2017-03-20T15:08:49Z
dc.date.issued2007-05
dc.description.abstractThe design of any MEMS component is subject to stringent manufacturing constraints. The knowledge about these constraints seems to be available to designers who have experienced the complexities of MEMS fabrication. In this thesis, we put forth the idea of automatically generating a fabrication sequence for surface micro-machined MEMS components using the knowledge stored in grammar rules. As an analogy to CAD tools used in mechanical systems, we envision creating a tool which has the Pro-Engineer approach to determining fabrication sequences for a machine tool based on the final part shape. This tool could be an integral addition to the current MEMS design software so that the designers can freely draft devices and then allow an automated process to determine the fabrication sequence. Further, we explain how we have designed the rules to make an expert system by extracting data from the already designed MEMS components. We have also included an example of the generation of the fabrication sequence for five MEMS components.en_US
dc.description.departmentMechanical Engineeringen_US
dc.format.mediumelectronicen_US
dc.identifierdoi:10.15781/T2M902792
dc.identifier.urihttp://hdl.handle.net/2152/46119
dc.language.isoengen_US
dc.relation.ispartofUT Electronic Theses and Dissertationsen_US
dc.rightsCopyright © is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en_US
dc.rights.restrictionRestricteden_US
dc.subjectMicroelectromechanical systems (MEMS)en_US
dc.subjectGrammar rulesen_US
dc.subjectComputer-aided design (CAD)en_US
dc.titleAutomated synthesis of fabrication sequence of MEMS components using graph grammarsen_US
dc.typeThesisen_US
dc.type.genreThesisen_US
thesis.degree.departmentMechanical Engineeringen_US
thesis.degree.disciplineMechanical Engineeringen_US
thesis.degree.grantorUniversity of Texas at Austinen_US
thesis.degree.levelMastersen_US
thesis.degree.nameMaster of Scienceen_US

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