Method of orientating a template with respect to a substrate in response to a force exerted on the template

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dc.contributor.assigneeBoard of Regents, The University of Texas System
dc.creatorSidlgata V. Sreenivasan
dc.creatorStephen C. Johnson
dc.creatorByung-Jin Choi
dc.date.accessioned2019-10-23T19:26:31Z
dc.date.available2019-10-23T19:26:31Z
dc.date.filed2004-02-27
dc.date.issued2006-06-13
dc.description.abstractThe present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.
dc.description.departmentBoard of Regents, University of Texas System
dc.identifier.applicationnumber10788685
dc.identifier.patentnumber7060402
dc.identifier.urihttps://hdl.handle.net/2152/76846
dc.identifier.urihttp://dx.doi.org/10.26153/tsw/3935
dc.publisherUnited States Patent and Trademark Office
dc.relation.ispartofUniversity of Texas Patents
dc.relation.ispartofUniversity of Texas Patents
dc.rights.restrictionOpen
dc.rights.restrictionOpen
dc.subject.cpcB82Y10/00
dc.subject.cpcB82Y40/00
dc.subject.cpcG03F9/00
dc.subject.cpcG03F7/0002
dc.subject.uspc355/72
dc.subject.uspc396/428
dc.subject.uspc430/22
dc.subject.uspc430/30
dc.titleMethod of orientating a template with respect to a substrate in response to a force exerted on the template
dc.typePatent

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