Method of orientating a template with respect to a substrate in response to a force exerted on the template

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Date

2006-06-13

Authors

Sidlgata V. Sreenivasan
Stephen C. Johnson
Byung-Jin Choi

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Publisher

United States Patent and Trademark Office

Abstract

The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.

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